To further the development of micro-mechanical testing, the InSEM-III was commissioned at the end of 2016. This nanoindenter allows in-situ nanoindentation, micro-compression and micro-bending experiments.
The equipment is heatable up to 800˚C, with independent tip and sample heating to minimise thermal drift. Finally, dynamic measurements and a high data acquisition rate allow the continuous measurement of hardness and modulus during indentation, enabling the accurate measurement of the properties of thin layers.
- in-situ (HT) nanoindentation
- micro-compression experiments
- micro-bending experiments
- Maximum indentation depth 50 µm
- Depth Accuracy 0.02 nm
- Noise floor <0.1 nm
- Force range up to 50 mN
- Force resolution 3 nN
- Data acquisition rate 500Hz
- Dynamic frequency up to 1 kHz
- separate tip and sample heating to minimize thermal drift
- max. 800°C
- Vacuum <106 mbar